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Laser Ablation of Polymer Thin Films

IP.com Disclosure Number: IPCOM000114563D
Original Publication Date: 1995-Jan-01
Included in the Prior Art Database: 2005-Mar-29
Document File: 2 page(s) / 31K

Publishing Venue

IBM

Related People

Druschke, F: AUTHOR [+3]

Abstract

Disclosed is a process which allows polymer thin films to be laser ablated by adding suitable doping additives without any change in the properties of the doped thin films.

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Laser Ablation of Polymer Thin Films

      Disclosed is a process which allows polymer thin films to be
laser ablated by adding suitable doping additives without any change
in the properties of the doped thin films.

      A nozzle plate for ink jet printers is coated with a three
layer polymer thin film system, a non wetting coating system based on
a perfluorosilane, to ensure a well-defined flow and reflow of the
ink during printing.  With an excimer laser of 308 nm wavelenght vias
have to be ablated into the nozzle plate made of a polyimide foil
with a thickness of about 75 &mu.m.

      After the ablation step in the past well shaped vias of defined
diameter have only been found in the polyimide foil whereas in the
non wetting coating layers the vias have not been opened or only
small areas of a via were opened.

      This problem was solved by adding salicylic acid,
2-hydroxy-5-methoxybenzoic acid or 4-hydroxy-benzophenone to the non
wetting coating layers.  These additives are soluble in water as well
as in alcohol and the doped non wetting coating layers of thin film
polymers showed the required absorption of the 308 nm excimer
wavelength.  To avoid a change in the desired properties of the
polymer thin films the doping concentration should not exceed about
20 weight % and preferably is about 2 weight % to ablate vias of high
quality.