Browse Prior Art Database

Ultra Violet Exposure Apparatus for Liquid Crystal Display

IP.com Disclosure Number: IPCOM000115310D
Original Publication Date: 1995-Apr-01
Included in the Prior Art Database: 2005-Mar-30
Document File: 2 page(s) / 31K

Publishing Venue

IBM

Related People

Taira, Y: AUTHOR [+2]

Abstract

Disclosed is a apparatus for the Ultra Violet (UV) light mask pattern exposure system suitable for Liquid crystal display alignment layer surface treatment. By using low pressure Mercury lamp array as a UV light source, a larger size object can be uniformly exposed with very low power consumption.

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Ultra Violet Exposure Apparatus for Liquid Crystal Display

       Disclosed is a apparatus for the Ultra Violet (UV) light mask
pattern exposure system suitable for Liquid crystal display alignment
layer surface treatment.  By using low pressure Mercury lamp array as
a UV light source, a larger size object can be uniformly exposed with
very low power consumption.

      The Figure shows the example of this apparatus.  An array of
low pressure Mercury lamps (1) is separated by few centimeters from
the object to get uniform light intensity distribution over the
entire object surface (2).

       This apparatus can be used for various types of mask pattern
exposure of large area with medium resolution.  Various kinds of
fluorescent lamps can be used instead of low pressure Mercury lamps
for the application which requires longer wavelength such as a
vicinity of 350nm for conventional photo resist.