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Random Access Cube Processing Fixture, X

IP.com Disclosure Number: IPCOM000115445D
Original Publication Date: 1995-May-01
Included in the Prior Art Database: 2005-Mar-30
Document File: 2 page(s) / 49K

Publishing Venue

IBM

Related People

Harper, BM: AUTHOR [+3]

Abstract

Disclosed is the design for a Random Access Memory (RAM) Cube Processing Fixture, X (Figure). This fixture allows a mix of various size Cubes through their production stages using existing Wafer processing techniques and equipment.

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Random Access Cube Processing Fixture, X

      Disclosed is the design for a Random Access Memory (RAM) Cube
Processing Fixture, X (Figure).  This fixture allows a mix of various
size Cubes through their production stages using existing Wafer
processing techniques and equipment.

      In prior art, commercially available production process
equipment used to preform grind, polish, etc., performed operations
on 125 and 200 millimeter wafers.  The challenge was to use this same
equipment to perform the same required production processes on memory
Cubes.

      A memory Cube is made by stacking a variable number of chips
one on top of another to form a Cube.  Because the number of chips
used varies, memory Cubes are different in height, width, and length
from each other.

      Most wafer equipment has programmable vacuum stages to secure
and move the wafer to programmed positions where tests and
inspections are performed.  The RAM Cube Processing Fixture, X holds
memory Cubes on the vacuum stage of the Test and Inspection
equipment, regardless of the Cubes size.

      The RAM Cube Processing Fixture, X has a flat bottom and
circular shape like a 125 mm diameter wafer so it can be set and
secured on a programmable vacuum stage.  On the fixture's top surface
are two insteps accurately machined at 90 degrees to each other.  The
corner formed by these two insteps allows the operator to accurately
set the memory Cube onto the fixture for locating purpose...