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Random Access Memory Cube Processing Fixture, Z

IP.com Disclosure Number: IPCOM000115466D
Original Publication Date: 1995-May-01
Included in the Prior Art Database: 2005-Mar-30
Document File: 2 page(s) / 51K

Publishing Venue

IBM

Related People

Harper, BM: AUTHOR [+3]

Abstract

Disclosed is the design for a Random Access Memory (RAM) Cube Processing Fixture, Z (Figure). This fixture allows a mix of various size Cubes through their production stages using existing Wafer processing techniques and equipment.

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This is the abbreviated version, containing approximately 75% of the total text.

Random Access Memory Cube Processing Fixture, Z

      Disclosed is the design for a Random Access Memory (RAM) Cube
Processing Fixture, Z (Figure).  This fixture allows a mix of various
size Cubes through their production stages using existing Wafer
processing techniques and equipment.

      In prior art, commercially available Processing equipment used
to grind, polish, ect., is used to perform operations on 125 and 200
millimeter wafers.  The challenge was to use this same equipment to
perform the same required production processes on memory Cubes.

      A memory Cube is made by stacking a variable number of chips
one on top of another to form a Cube.  Because the number of chips
used varies, memory Cubes are different in height, width, and length
from each other.

      Most wafer equipment has programmable vacuum stages to secure
and move the wafer to programmed positions where production processes
are performed.  The RAM Cube Processing Fixture, Z holds memory Cubes
on the vacuum stage of the production process equipment, regardless
of the Cubes size.

      The RAM Cube Processing Fixture, Z has the flat bottom and
circular shape of a 125 mm wafer so it can be set and secured on a
programmable vacuum stage.  On the fixture's top surface are two
insteps accurately machined at 90º  to each other.  The corner
formed by these two insteps allows the operator to accurately set the
memory Cube onto the fixture for locating purposes.

      O...