Browse Prior Art Database

Miniaturized Particle Counter

IP.com Disclosure Number: IPCOM000115497D
Original Publication Date: 1995-May-01
Included in the Prior Art Database: 2005-Mar-30
Document File: 2 page(s) / 49K

Publishing Venue

IBM

Related People

Brunsch, A: AUTHOR [+3]

Abstract

Micromechanic fabrication of a particle counter based on laser light scattering principle is described. Miniaturization will enable integration of particle counters within fabrication tools. Micromechanic methods will enable the construction of arrays of sensors to obtain information of spatial particle distribution. Batch processing will reduce cost of manufacturing significantly.

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Miniaturized Particle Counter

      Micromechanic fabrication of a particle counter based on laser
light scattering principle is described.  Miniaturization will enable
integration of particle counters within fabrication tools.
Micromechanic methods will enable the construction of arrays of
sensors to obtain information of spatial particle distribution.
Batch processing will reduce cost of manufacturing significantly.

      Micromechanical methods are used to etch a hole into a silicon
wafer.  The hole will be the detecting area for particles falling
through.  On the side walls of this hole photodetector structures
will be built i.e. a standard pn- or pin- photodiode.  One method for
building such a structure on the side wall of a wafer substrate may
be an isotropic full area deposition of suitable material followed by
a mechanical polishing process.

      The laser light source may be an integrated semiconductor
laserdiode.  Alternatively the light of an external laser will be
guided to the detecting area by means of a glas fibre.  The laser
light may be spreadened by an integrated cylindrical shaped lens,
fabricated by LIGA technique (a micro injection moulding method).