Browse Prior Art Database

Plenary Adjustment Disk

IP.com Disclosure Number: IPCOM000115701D
Original Publication Date: 1995-Jun-01
Included in the Prior Art Database: 2005-Mar-30
Document File: 2 page(s) / 51K

Publishing Venue

IBM

Related People

Harper, B: AUTHOR [+2]

Abstract

Disclosed herein is an invention of how to orient, secure and level the critical surface of a Cube adjusting it to the same plain of a reference disk.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 86% of the total text.

Plenary Adjustment Disk

      Disclosed herein is an invention of how to orient, secure and
level the critical surface of a Cube adjusting it to the same plain
of a reference disk.

      To process the Cube through the Ultra-Stepper it has to be
oriented, it has to be secured so it will not move through the
various stages of the process, it has to be level and it has to be
exactly on the same plain as the reference disk.  This is
accomplished through the design of a three point adjustable holding
disk.  For orientation the Cube is placed in the center of the disk,
into an accurately machined cavity which uses a two point X,Y
reference system.  It is secured through a spring loaded holding
device.  The leveling and plain adjustment is the most complex part
of the design.  The entire disk must float during initial adjustments
under a microscope and it has to be accurately located and secured so
that it will not move after all adjustments have been made.  Three
pins are used for location and orientation of the disk.  Each
locating hole in the is unique.  All are tapered to allow the disk to
float during adjustments.  One hole is round and closely machined to
a tight slip fit tolerance, the next hole is similar to a slot with
the narrow portion closely machined to a tight slip fit tolerance.
The final hole is round and machined to a very loose open tolerance.
The unique design of the three holes accurately locates the disk and
allows the floating freedom requi...