Browse Prior Art Database

Cube Plenary Fixture

IP.com Disclosure Number: IPCOM000115763D
Original Publication Date: 1995-Jun-01
Included in the Prior Art Database: 2005-Mar-30
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Harper, B: AUTHOR [+2]

Abstract

Disclosed is an invention to accurately adjust the surface of a Cube putting it on the same plain with a disk which is used as the alignment surface while traveling through an Ultra-Stepper Photolithography Tool.

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This is the abbreviated version, containing approximately 100% of the total text.

Cube Plenary Fixture

      Disclosed is an invention to accurately adjust the surface of a
Cube putting it on the same plain with a disk which is used as the
alignment surface while traveling through an Ultra-Stepper
Photolithography Tool.

      DESCRIPTION OF INVENTION

      The Cube is placed into a cavity and secured through a spring
loaded clamping device.  The cavity is located in a disk which has
three .060 diameter balls equally spaced and mounted to on the bottom
of the disk.  The disk is secured in place over three pins, however
the disk is designed to float around the pins.  The balls rest on
three tapered blocks which are adjustable in and out through a spring
and screw mechanism.  This allows for a three point plain adjustment
to the Cubes surface.  An accurately horizontally machined top disk
is secured around the Cube using accurately machined spacers to
maintain
the horizontal position over three locating pins, the top disk must
not
move.  Under a microscope, the three tapered blocks are adjusted
until
the Cube surface is aligned with the top disk plain.  The Cube is now
ready for processing through the Ultra-Stepper (Figs. 1 and 2).