Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

Patterning Method for Multi-Layer Film

IP.com Disclosure Number: IPCOM000116013D
Original Publication Date: 1995-Jul-01
Included in the Prior Art Database: 2005-Mar-30
Document File: 2 page(s) / 45K

Publishing Venue

IBM

Related People

Makita, A: AUTHOR [+2]

Abstract

Disclosed is a wet-etching method to make a contact hole with good selectivity regardless of the combination of metal and etchant. By applying negative voltage (anode protection) or positive voltage (cathode protection) as soon as the etching of insulator on the metal is completed, etching of the metal discontinues, and the contact hole is made with good control.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 93% of the total text.

Patterning Method for Multi-Layer Film

      Disclosed is a wet-etching method to make a contact hole with
good selectivity regardless of the combination of metal and etchant.
By applying negative voltage (anode protection) or positive voltage
(cathode protection) as soon as the etching of insulator on the metal
is completed, etching of the metal discontinues, and the contact hole
is made with good control.

      The Figure shows the process to make the contact hole when the
metal under the insulator is easy to be dissolved in the etchant that
is used to etch the insulator on the metal.  After depositing the
aluminum with the sputtering method and making anodization of
aluminum (Figs. (a) and (b)), photo resist is coated and patterned to
make the contact hole mask (Fig. (c)).  Then, aluminum and platinum
electrodes are connected to Direct Current (DC) source/monitor and
etching of the insulator is begun (Fig. (d)).  When etching of the
insulator is complete, aluminum is exposed in the etchant so the
electric potential is observed with DC source/monitor changes (Fig.
(e)).  By detecting the change of electric potential and applying
negative or positive voltage to aluminum, etching of the metal is
prevented.  If negative voltage is applied, the metal becomes anode
and makes passivity, and the etching stops.  If positive voltage is
applied, the metal becomes cathode and as the electron goes into the
metal, the etching stops.

      This method can be applied...