Browse Prior Art Database

Method to Adjust Magnification and Distortion in X-Ray Masks

IP.com Disclosure Number: IPCOM000116097D
Original Publication Date: 1995-Aug-01
Included in the Prior Art Database: 2005-Mar-30
Document File: 2 page(s) / 51K

Publishing Venue

IBM

Related People

Silverman, JP: AUTHOR

Abstract

Disclosed is a method for adjusting both magnification and distortion of an x-ray mask for use in x-ray lithography. Such adjustment is desirable in order to match the size and distortions of the pattern to be transferred in this process to those of an existing pattern that has been created by previous processing.

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This is the abbreviated version, containing approximately 70% of the total text.

Method to Adjust Magnification and Distortion in X-Ray Masks

      Disclosed is a method for adjusting both magnification and
distortion of an x-ray mask for use in x-ray lithography.  Such
adjustment is desirable in order to match the size and distortions of
the pattern to be transferred in this process to those of an existing
pattern that has been created by previous processing.

      The present method consists of a means of applying inward
radial forces which cause the mask to change in size.  X-ray masks
are typically fabricated by forming a thin membrane which is attached
to a glass mounting ring.  The membrane is under tension.  An example
of an implementation is shown in the Figure, in which the forces are
applied to the circular ring (1) by a series of actuators (2).  The
number and locations of actuators can be chosen to optimize the
control of distortion within the constraints of available space and
cost/benefit analysis.  Each actuator can be controlled
independently.  Contact pads (3) may also be used to distribute the
force from each actuator over some area.  If all actuators apply the
same amount of force, the resulting change in shape will be a uniform
change in magnification (though there may be small deviations
depending on the number of actuators and the distribution of force by
contact pads).  Applying different forces from each actuator can
result in distortion of the pattern, including different amounts of
magnification along the x an...