Browse Prior Art Database

Method to Adjust Magnification in X-Ray Masks

IP.com Disclosure Number: IPCOM000116145D
Original Publication Date: 1995-Aug-01
Included in the Prior Art Database: 2005-Mar-30
Document File: 2 page(s) / 43K

Publishing Venue

IBM

Related People

Silverman, JP: AUTHOR

Abstract

Disclosed is a method for adjusting the magnification of an x-ray mask for use in x-ray lithography. Such adjustment is desirable in order to match the size of the pattern to be transferred in this process to the size of an existing pattern that has been created by previous processing.

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Method to Adjust Magnification in X-Ray Masks

      Disclosed is a method for adjusting the magnification of an
x-ray mask for use in x-ray lithography.  Such adjustment is
desirable in order to match the size of the pattern to be transferred
in this process to the size of an existing pattern that has been
created by previous processing.

      The present method consists of a means of applying a uniform,
inward radial force which causes the mask to contract in size.  X-ray
masks are typically fabricated by forming a thin membrane which is
attached to a glass mounting ring.  The membrane is under tension.
An example of how to apply such a force is shown in the Figure, in
which the force is generated by mounting a flexible strap (1) around
the circular ring (2).  A clamping mechanism (3) at the ends of the
strap is used to apply tension to the strap, which in turn exerts the
inward radial force.  The force is uniform (except for small effects
at the ends of the strap) due to the symmetry of the arrangement.
The amount of tension in the strap, and hence the amount of inward
force, can be controlled by adjusting the force applied by the
clamping mechanism.  This mechanism could use a motor, a
piezoelectric transducer, a strain gauge, a hydraulic or pneumatic
actuator, or some other mechanical means to apply the force.  The
amount of force could be adjusted by use of calibrations, or it could
be actively measured and fed back to a controller.  Depending on the
c...