Browse Prior Art Database

Automatic Positioning of a Chip at Final Test Operation with an Automatic Wafer Prober

IP.com Disclosure Number: IPCOM000116449D
Original Publication Date: 1995-Sep-01
Included in the Prior Art Database: 2005-Mar-30
Document File: 2 page(s) / 70K

Publishing Venue

IBM

Related People

Anselot, JL: AUTHOR [+3]

Abstract

Accurate and repetitive positioning in the space of three geometrical references on a vertical axe at a determined point is performed by programming an automatic positioning system such as the wafer prober 2001X/3001X sold by Electroglass.

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This is the abbreviated version, containing approximately 55% of the total text.

Automatic Positioning of a Chip at Final Test Operation with an Automatic
Wafer Prober

      Accurate and repetitive positioning in the space of three
geometrical references on a vertical axe at a determined point is
performed by programming an automatic positioning system such as the
wafer prober 2001X/3001X sold by Electroglass.

      The objective is to determine the references of this point for
each different product to be tested.  The method includes the steps
of:  teaching, programming and saving the data so that the system is
able to auto position the chuck for each product at this reference
point.  The disclosed method avoids the tedious task of manual
positioning which is a major source of errors.  Moreover, it allows
mixing different categories of chips at the picking operation.

      The geometrical references of the reference chip are first
entered in the system, i.e., the programming and saving steps with
auto-alignment of the reference chip according with the specific
coordinates of the product to be tested will be described hereafter
by reference to the Figure.
  1.  Teaching and basic programming - Probe center (C1) mechanically
       guaranty a stable assembly.  Center of the chuck (C2)
determines
       the vertical axe with a mechanical gauge.  Finally, the center
of
       the wafer (C3) is aligned with the center of the chuck using a
       standard wafer prober option.
        The three centers C1,...