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Browse Prior Art Database

Increased Contrast for X-Ray Microscopy

IP.com Disclosure Number: IPCOM000116761D
Original Publication Date: 1995-Nov-01
Included in the Prior Art Database: 2005-Mar-31
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Wagner, D: AUTHOR

Abstract

Disclosed is a method which analyzes the phase changes in a developed X-ray resist by microinterferometric phase measurements to enhance the contrast by a factor of 1000 compared to the method of analyzing the photographic density of an X-ray film.

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This is the abbreviated version, containing approximately 73% of the total text.

Increased Contrast for X-Ray Microscopy

      Disclosed is a method which analyzes the phase changes in a
developed X-ray resist by microinterferometric phase measurements to
enhance the contrast by a factor of 1000 compared to the method of
analyzing the photographic density of an X-ray film.

      The resolution of a microscope is defined by the wavelength of
the illuminating light and by the numerical aperture of the
objective.  Using the highest numerical aperture in air, N.A.=0.95,
and UV-light reduces the resolution limit down to 200 nm.  In
biology, medicine or gene technology there are a lot of organical
objects having substantially smaller dimensions.  Known high
resolution microscopes like the secondary electron microscope or the
atomic force microscope could not yet demonstrate their usability for
organical objects.

      Soft X-rays with wavelengths from 0.5 nm to 50 nm should
enhance the optical resolution by a factor of about 100.
Unfortunately, this could not be reached due to unsufficient contrast
in known methods of analyzing the photographic density of an X-ray
film with a light microscope.  The unsufficient contrast is caused by
a carbon-layer of typically 200 nm which attenuates the soft X-ray
radiation by a factor of 2.

      Interferometric methods allow to measure the topography or
phase of a two-dimensional object with an accuracy of 1 A.  Suitable
recording media are resists of high sensitivity and high resolution
developed f...