Browse Prior Art Database

Multiple Disk Load Pallet for Automation

IP.com Disclosure Number: IPCOM000116995D
Original Publication Date: 1995-Dec-01
Included in the Prior Art Database: 2005-Mar-31
Document File: 4 page(s) / 108K

Publishing Venue

IBM

Related People

Bianchini, J: AUTHOR [+7]

Abstract

Disclosed is an invention that describes a design for a vertical pallet that all ows simultaneous multiple automated disks loads utilizing existing single robot cell. This pallet minimizes potential warping problems caused by high ( 200 sup o C) temperatures found in the sputtering process use for disk manufacturing.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 52% of the total text.

Multiple Disk Load Pallet for Automation

      Disclosed is an invention that describes a design for a
vertical pallet that all ows simultaneous multiple automated disks
loads utilizing existing single robot cell.  This pallet minimizes
potential warping problems caused by high ( 200 sup o C) temperatures
found in the sputtering process use for disk manufacturing.

      In prior art, other implementations were either manual or disks
were loaded with robots one at a time.

      Loading disks onto a vertical pallet for the sputtering process
is a very difficult task.  The disk holes are very close together to
maximize capacity.  The temperature in the sputter system is normally
above 200 degrees C.  This high temperature can cause the pallet to
warp.  The pallet surface is no longer flat when it travels and
circulates through the HOT and COOL cycles inside and outside the
sputter system.

      As the disk industry designs systems with smaller and smaller
disks, it is not profitable nor practical to have the operator
manually load these small disks.  The number of disks loaded by the
operator is therefore limited in order to achieve desired cycle
times.  The disk industry is presently utilizing one robot to load
one disk at a time onto the pallet.  To load multiple disks
simultaneously, multiple robot cell in a production line.

      This invention describes a pallet for disk loading which has a
U GROVE and THREE POINT CONTACT.  This pallet, while having less
holding area to avoiding disk shadowing, is still stable enough the
hold the disk st...