Browse Prior Art Database

Method of Stabilizing a Magnetic Exchange Coupling

IP.com Disclosure Number: IPCOM000117100D
Original Publication Date: 1995-Dec-01
Included in the Prior Art Database: 2005-Mar-31
Document File: 2 page(s) / 29K

Publishing Venue

IBM

Related People

Christoffer, B: AUTHOR [+2]

Abstract

For many applications, the provision of a magnetic exchange coupling is critical to the entire production process; e.g., in the case of Magnetic Read (MR) heads.

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Method of Stabilizing a Magnetic Exchange Coupling

      For many applications, the provision of a magnetic exchange
coupling is critical to the entire production process; e.g., in the
case of Magnetic Read (MR) heads.

      For this purpose, an Al(2)O(3) film is first sputtered onto an
NiFe film and then etched off.  An MnFe film is sputtered onto the
NiFe surface in order to prevent changes in the magnetic domains of
the NiFe film.

      As a result, a magnetic exchange coupling is obtained between
the NiFe film and the MnFe film.  This exchange coupling must be
stable to a certain extent during the production process.

      Previously, it was found that residues of the Al(2)O(3) film,
even very thin layers of a couple of A, may destroy the exchange
coupling.  It has now been discovered that a very satisfactory
exchange coupling can be obtained if traces of hydrocarbons, such as
isopropyl alcohol, are present in the Al(2)O(3) sputtering
apparatus.  For this purpose, the hydrocarbons are introduced into
the process chamber before sputtering.  This yields a stable exchange
coupling of about 35 Oersted on monitor wafers and of about 18
Oersted
on production wafers.