Browse Prior Art Database

Array Tip Characterizer for Scanning Probe Microscopes

IP.com Disclosure Number: IPCOM000118081D
Original Publication Date: 1996-Sep-01
Included in the Prior Art Database: 2005-Mar-31
Document File: 2 page(s) / 43K

Publishing Venue

IBM

Related People

Bayer, T: AUTHOR [+4]

Abstract

Disclosed is a tip characterizer structure that allows to characterize different tip shapes in 3-D mode.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Array Tip Characterizer for Scanning Probe Microscopes

      Disclosed is a tip characterizer structure that allows to
characterize different tip shapes in 3-D mode.

      Known line-shaped tip calibration standards allow a quasi
2-dimensional tip characterization which is adequate for many
scanning probe microscope applications like, e.g., measuring a
line-shaped structure on a semiconductor chip.  Other applications
like, e.g., measuring substantially ring-shaped contact holes require
completely knowing the 3-dimensional shape of the tip to provide
relevant measuring  results.

      The proposed characterizer structure is an array of tips shaped
according to the tip to be characterized.  The schematic
cross-section of three differently shaped tips for the array are
shown in Figs. 1 to 3.

      Arrays with tips shown in Figs. 2 or 3 are suitable for
characterizing cone-shaped tips as these types of calibration tips
allow to determine the cone angle, whereas arrays with tips shown in
Fig. 1 allow to measure the tip radius.  For completely
characterizing a tip, it may be advantageous to use several
differently shaped calibration tips.

      The tip arrays simplify the finding of a calibration tip and
during the calibration step, statistically compensate for
manufacturing irregularities or damages.