Browse Prior Art Database

Buried Stud Planar Attach Head

IP.com Disclosure Number: IPCOM000118149D
Original Publication Date: 1996-Oct-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 4 page(s) / 62K

Publishing Venue

IBM

Related People

Fatula, JJ: AUTHOR [+2]

Abstract

One of the major problems encountered when connecting magnetic heads to suspension arms is that the bonding pads were not on the back side of the recording (read/write) elements. Disclosed is a head structure where the bond pads were located on the back of Air-Bearing Surface for easy and simple arm connection. A method of building such a "Buried Pad Head" is schematically shown in Figs. 1 through 5b. These Figures represent a typical cross-section, normal to the substrate surface.

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Buried Stud Planar Attach Head

      One of the major problems encountered when connecting magnetic
heads to suspension arms is that the bonding pads were not on the
back side of the recording (read/write) elements.  Disclosed is a
head structure where the bond pads were located on the back of
Air-Bearing Surface for easy and simple arm connection.  A method of
building such a "Buried Pad Head" is schematically shown in Figs. 1
through 5b.  These Figures represent a typical cross-section, normal
to the substrate surface.

      Fig. 1  Array of deep trenches on substrate were created by
machining (for example, saw cutting), laser etching, Reactive Ion
Etching (RIE), etc..

      Fig. 2  Chemical Vapor Deposition (CVD) of dielectrics, such
as Si02, TEOS, Si3N4, SiONx, etc. conformally coated on substrate.

      Fig. 3  After blank electrochemical deposited copper, the
excess copper were lapped.

      Fig. 4  Shown in this schematics is "Alumina Undercoat with
lithographically etched vias" and "Copper plated buried
connecting-path".

      Fig. 5a  Conventional MR or inductive head processes were
employed to build up the wafer.  Shown in this schematic are the
"Buried pads" on the back of a slider.

      Fig. 5b  ABS side of a "Buried pad planar attached head".