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Browse Prior Art Database

Emptying of Photoresist Containers in a Solvent Atmosphere

IP.com Disclosure Number: IPCOM000118256D
Original Publication Date: 1996-Nov-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 2 page(s) / 59K

Publishing Venue

IBM

Related People

Calmbach, S: AUTHOR [+2]

Abstract

Disclosed is an improvement of the conditions for the use of photoresist containers.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 52% of the total text.

Emptying of Photoresist Containers in a Solvent Atmosphere

      Disclosed is an improvement of the conditions for the use of
photoresist containers.

      The photoresist for wafer coating is normally delivered in
bottles of one liter up to one gallon.  Most types of bottles can be
used directly at the coating machine.  Therefore, its sealed cap has
to be pierced through for the insertion of a suction pipe, including
ventilation.  The bottle contents are pumped empty with a dosing
pump.  Unfortunately, the resist gets gelatinized and is drying up
against the bottle wall.  Occasional agitation can loosen up such
thickened resist film.  However, the gel particles will be absorbed
inside the subsequently added filter.  Therefore, the lifetime of
this relatively expensive filter is shortened and more maintenance
cycles are required.

      To overcome this problem, a photoresist packaging system is
provided, wherein the enlarging volume of gas, during emptying of the
container, should be compensated with its resist typical solvent
agent resaturated intake air, instead of just plain air being sucked
in.

      By this kind of container emptying, no drying up of the resist
can happen and expensive containers with internal resist balloons are
not required.

Two suitable ways to achieve these advantages can be considered:
  1.  Addition of the venting mixture by means of a closed
       evaporation system

In this case, the resist container is connected to a second container
which is only partially fille...