Browse Prior Art Database

On-Line Statistic Process Control for Semiconductor Manufacturing Execution System

IP.com Disclosure Number: IPCOM000118374D
Original Publication Date: 1997-Jan-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Kawamuro, J: AUTHOR

Abstract

Disclosed is an online Statistic Process Control (SPC) subsystem in a Manufacturing Execution System (MES) which gets data from a measurement tool or a process tool through SECS I/F and analyzes data based on SPC rules (Western Electric Rules). If Online-SPC detects any SPC Rule violation or a trend anomaly, the MES sends a message or warning to an operator/engineer registered in the MES.

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On-Line Statistic Process Control for Semiconductor Manufacturing
Execution System

      Disclosed is an online Statistic Process Control (SPC)
subsystem in a Manufacturing Execution System (MES) which gets data
from a measurement tool or a process tool through SECS I/F and
analyzes data  based on SPC rules (Western Electric Rules).  If
Online-SPC detects any  SPC Rule violation or a trend anomaly, the
MES sends a message or warning  to an operator/engineer registered in
the MES.

      The data flow is shown in the Figure.  Note that MES or
Computer Integrated Manufacturing (CIM) are sononymous.

      The data goes to a SPC engine and is warned if the data is
abnormal - based on SPC rules.

      Engineers/Operators who are registered get a notice through
E-mail or wireless devices online.  This function is the same
diagnosis since the senior operator recognizes anomalies through
operations by unwritten long-term experience.

      A new idea is a MES-embedded SPC warning mechanism and SPC
rules.  It is well known in the industry.

      If the mechanism or online SPC is ready in the MES system,
beginners can easily play roles of senior operators at skill-level
stand.  If SPC rules are Western Electric Rule equivalent, the idea
is well applicable.