Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

Standard Mechanical Interface Facility Pod Base-Element Modification

IP.com Disclosure Number: IPCOM000118377D
Original Publication Date: 1997-Jan-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 2 page(s) / 34K

Publishing Venue

IBM

Related People

Ida, T: AUTHOR [+2]

Abstract

Disclosed is a modification of a Standard Mechanical Interface Facility (SMIF) Pod*, which is a product commercially available in a market. A SMIF Pod* is an air-tight vessel of semiconductor wafers to keep the vicinity around the wafers clean. A rubber pedestal insertion solves the problem of cracking or breakage of the inner plastic cover due to its frangibility.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Standard Mechanical Interface Facility Pod Base-Element Modification

      Disclosed is a modification of a Standard Mechanical Interface
Facility (SMIF) Pod*, which is a product commercially available in a
market.  A SMIF Pod* is an air-tight vessel of semiconductor wafers
to keep the vicinity around the wafers clean.  A rubber pedestal
insertion solves the problem of cracking or breakage of the inner
plastic cover due to its frangibility.

Fig. 1 shows a cross section of a SMIF Pod*.

      The stopper area has a bump shape with a void, which is a part
of the inner plastic sealing, to isolate wafers from the outside
environment along with an upper hard plastic cover.  A stopper area
is shown in detail in Fig. 2.

      A rubber pedestal embedded under a stopper decreases the
probability of cracking or breakage because the inner plastic
deformation by a cassette collision is much improved by a rubber
cushion.
  *  Trademark of Assyst Technology