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Browse Prior Art Database

New Handling Concept for Polishing Equipments

IP.com Disclosure Number: IPCOM000118451D
Original Publication Date: 1997-Feb-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 2 page(s) / 57K

Publishing Venue

IBM

Related People

Fournier, B: AUTHOR

Abstract

Disclosed is a method for a handling device for moving silicon wafers into the load/unload stations of a chemical mechanical polishing tool.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 81% of the total text.

New Handling Concept for Polishing Equipments

      Disclosed is a method for a handling device for moving silicon
wafers into the load/unload stations of a chemical mechanical
polishing tool.

      Chemical Mechanical Polishing (CMP) for planarization has
become one of the most rapidly growing segments of the semiconductor
manufacturing.

      CMP is unique in its ability to provide global planarization
of both insulator and conductor layers in multilevel metallization
interconnect structures.

      For this disclosure, the new handling concept has been
installed on a model MECAPOL commercially sold by PRESI, Grenoble,
France, a fully automated, single wafer processing, dual-polish
platen, cassette to cassette system that is operated by a computer.

      According to the state of the art approach, the wafer is moved
by a robot provided a shuttle.  The robot transfers a wafer from the
load station (A) to the first polishing station (B) and another wafer
to the second polishing station (C).  After treatment, the wafers are
transferred by the robot to the unload station (D).  With this
approach, the shuttle movements are not optimized and the
productivity is affected  by the waiting time through intermediate
movements of the robot.

      In the new handling approach, the robot movements are minimized
by using a robot with a double shuttle.  During the sequence process,
the robot takes the wafer on the polishing station (A) with the first
shut...