Browse Prior Art Database

Universal Probe Tip Characterizer

IP.com Disclosure Number: IPCOM000118615D
Original Publication Date: 1997-Apr-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 2 page(s) / 43K

Publishing Venue

IBM

Related People

Bayer, T: AUTHOR [+3]

Abstract

Disclosed is a single crystal material probe tip characterizer with vertical sidewalls and a V-shaped groove in between. This calibration standard is suitable for characterizing flared tips and cone-shaped tips.

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Universal Probe Tip Characterizer

      Disclosed is a single crystal material probe tip characterizer
with vertical sidewalls and a V-shaped groove in between.  This
calibration standard is suitable for characterizing flared tips and
cone-shaped tips.

      The calibration standard known from (*) comprises a plurality
of neighboring V-shaped grooves.  Facing sidewalls of two grooves
form a sharp blade with a radius of a few nanometers.  The angle
between the  facing sidewalls is, however, relatively obtuse and due
to process fluctuations, the depth of the V-shaped grooves is
varying.

      Especially for characterizing flared tips, the angle between
the facing sidewalls should be small and constant over all blades and
the depth of the several grooves should be constant as well.

      The probe tip characterizer 1, shown in Fig. 1, has extremely
vertical sidewalls formed by anisotropic plasma etching with a
reproducibility of approximately +-  0.5º.  The V-shaped groove
is formed by (111)-planes.  This allows to achieve an extreme
reproducibility when forming the grooves and to meet the angle and
depth requirements.

      Fig. 2 schematically shows a line-scan of the probe tip
characterizer 1 made with a flared tip 2 with d1 and d2 representing
the diameter of the flared tip.  This line-scan provides the complete
information of the calibration standard.  As the flared tip ideally
is symmetrical, d1 and d2 are of equal length.  This allows
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