Browse Prior Art Database

All Alumina Insulation Layers for Magnetic Recording Heads

IP.com Disclosure Number: IPCOM000118621D
Original Publication Date: 1997-Apr-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 2 page(s) / 32K

Publishing Venue

IBM

Related People

Sahami, S: AUTHOR [+2]

Abstract

Disclosed is a process by which the organic photoresist insulation layers in the magnetic heads are replaced with sputtered alumina (Al2O3). Such a structure has a much lower thermal and mechanical mismatch among different layers, compared to conventional magnetic recording heads.

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All Alumina Insulation Layers for Magnetic Recording Heads

      Disclosed is a process by which the organic photoresist
insulation layers in the magnetic heads are replaced with sputtered
alumina (Al2O3).  Such a structure has a much lower thermal and
mechanical mismatch among different layers, compared to conventional
magnetic recording heads.

      As a result, 1) stress in the head is reduced and head magnetic
stability is improved; 2) stress induced alumina overcoat cracking is
eliminated; and 3) the alumina overcoat protrusion sensitivity to
temperature is eliminated.

      The fabrication of "all alumina head" remains the same as the
conventional head up to the application of the first photo insulation
layer.  The alumina spacer is deposited using RF sputtering instead
of photo insulation layer.  The alumina is then lapped to a smooth
flat surface.  A seed layer is deposited overlapped alumina, followed
by photo patterning for copper coils.  The wafer is ion milled to
create trenches in alumina where the copper coil would be plated
next. After  copper plating, the wafer is lapped.  Isotropic and
non-isotropic alumina etchants are used wherever needed to define
apex angle or open up  vias, respectively.  Depending on number of
coil layers, the prior steps  could be repeated up to deposition of
the second pole piece.

      The heads described here have been tested for magnetic domain
stability, alumina cracking, and alumina overcoat protrus...