Browse Prior Art Database

High-Speed Substrate Changer

IP.com Disclosure Number: IPCOM000118657D
Original Publication Date: 1997-May-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 6 page(s) / 132K

Publishing Venue

IBM

Related People

Nakagaki, J: AUTHOR [+3]

Abstract

High-Speed Substrate Changer is a mechanical unit which is able to transfer two thin substrates (100 mm square, 0.4 mm to 4 mm thick) simultaneously, within one second.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 66% of the total text.

High-Speed Substrate Changer

      High-Speed Substrate Changer is a mechanical unit which is able
to transfer two thin substrates (100 mm square, 0.4 mm to 4 mm thick)
simultaneously, within one second.

      The key mechanical movements are chucking unit up and down and
Clock Wise/Counter Clock Wise (CW/CCW) rotations driven by mechanical
cams, resulting in minimal time to pursue each movement with high
reliability and durability.  The chucking arms are equipped with
open/close sensors to detect malfunctions, such as chucking errors,
and designed to grab only side edges to prevent handling damages to
surface elements, such as printed electrical circuits.

      This changer is a compact unit, which is suitable for easy
installation into any process and test equipment with automatic
substrate handler.

Fig. 1 shows the unit installed in a tester.  The high-speed
substrate changer consists of two units:
  1.  pick and place unit
  2.  substrate chucking unit

Fig. 2 shows the step-by-step actions of a high speed substrate
changer:
  1.  Move down to pick-up position
  2.  Close arms to chuck substrates A and B
  3.  Move up to transfer position
  4.  Rotate CW 90 degrees to place position
  5.  Move down to place position
  6.  Open arms to release the substrates A and B
  7.  Move up to transfer position
  8.  Rotate CCW 90 degrees to the waiting position

      Fig. 3 shows key components of a pick and place unit.  The
rotation of the...