Browse Prior Art Database

High-Speed Flying Probe System

IP.com Disclosure Number: IPCOM000118659D
Original Publication Date: 1997-May-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 4 page(s) / 83K

Publishing Venue

IBM

Related People

Okasaka, K: AUTHOR

Abstract

Disclosed is a High-Speed Flying Probe System which provides fast and accurate probing for testing fine pitch electronic circuits on Epoxy-Grassor Ceramic Substrates at a low cost.

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This is the abbreviated version, containing approximately 52% of the total text.

High-Speed Flying Probe System

      Disclosed is a High-Speed Flying Probe System which provides
fast and accurate probing for testing fine pitch electronic circuits
on Epoxy-Grassor Ceramic Substrates at a low cost.

      The key components of the High-Speed Flying Probe System are at
least two Hummingbird MINI-Positioners and at least two Linear
Actuators (with Plane Linear Motors and Air bearing Technology).

      The Hummingbird MINI-Positioner is capable of positioning
in XYZ directions more than 50 cycle/seconds with less than 10 um
positioning errors (with Voice Coil Motor technology).

      The Hummingbird MINI-Positioner's envelope is 13 mm square in
XY direction, 1 mm in a vertical direction; therefore, the Linear
Actuator takes charge of transferring the Hummingbird MINI-Positioner
to cover the work area, such as 450 mm square.

      The Linear Actuator consists of the plane linear motor with no
ball screw and no guide rails and is able to position in XY
directions on the platen's surface.  This simple mechanism provides
high reliability  and easier maintenance compared with the system
which has guided rails  and a ball screw mechanism.  Moreover, the
air bearing, which lifts the  moving element, is capable of high
speed actuation and positioning.

      The above configuration presents the low cost High-Speed Flying
Probe System which has the same performance as a system which
consists of Z-probe units and XY-Robots.

      The Figure shows an example of a High-Speed Flying Probe
System.  Hummingbird MINI-Positioners (1, 2, 3, 4) are mounted on
each moving element of Linear Actuators (5, 6, 7, 8).

      Linear Actuators move positioning points according to NC
data which is generated by the collision avoid...