Browse Prior Art Database

Measuring Apparatus for Substrate Carrier Used in Sputtering Devices

IP.com Disclosure Number: IPCOM000118671D
Original Publication Date: 1997-May-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 2 page(s) / 27K

Publishing Venue

IBM

Related People

Wald, M: AUTHOR

Abstract

Disclosed is a measuring device for determining the serviceability of substrate carriers used in sputtering devices.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Measuring Apparatus for Substrate Carrier Used in Sputtering Devices

      Disclosed is a measuring device for determining the
serviceability of substrate carriers used in sputtering devices.

      The perforated substrate carriers for holding magnetic disks
can be deflected or warped after mechanical purification and
reinstallation into the transport car.  This deflection is due to the
construction of the substrate carriers because of a one-sided
weakening of the disk receiving hole towards the equipping side.

      This difficulty can be removed by performing a controlling
measurement of each newly equipped transport car.  The measurement is
carried out using highly precise ultrasound sensors.

      By means of a calibration strip, the distance between sensor
and substrate carrier is set to zero.  Subsequently, the ultrasound
sensors are manually brought to different test points on the
transport car and the resulting measuring values are indicated.

      The measured value corresponds to the deviation between the
calibration strip and the actual value.

      An average value is formed by performing several measurements
in turn.

      Using this measuring apparatus, a quick and reliable
measurement of the deviation can be performed.