Browse Prior Art Database

Thin, High Precision, High Speed Z Stage

IP.com Disclosure Number: IPCOM000118674D
Original Publication Date: 1997-May-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 2 page(s) / 55K

Publishing Venue

IBM

Related People

Okasaka, K: AUTHOR

Abstract

Disclosed is a Thin, High Precision, and High Speed Z Stage with highlights of compact, especially thin packaging and swift and accurate vertical positioning. The Z Stage positions epoxy-glass or ceramic substrates with a wide range of thickness, 0.5 mm to 5 mm, in case of 100 mm square substrate. The linear movement of a horizontal stage driven by a ball screw with a servo motor is converted to vertical motion by tapered plates.

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Thin, High Precision, High Speed Z Stage

      Disclosed is a Thin, High Precision, and High Speed Z Stage
with highlights of compact, especially thin packaging and swift and
accurate vertical positioning.  The Z Stage positions epoxy-glass or
ceramic substrates with a wide range of thickness, 0.5 mm to 5 mm, in
case of 100 mm square substrate.  The linear movement of a horizontal
stage driven by a ball screw with a servo motor is converted to
vertical motion by tapered plates.

      All actuators are guided by more than two linear motion guides
aiming at reduced height and not only accurate positioning but also
minimal pitching and yawing errors.  Moreover, this compact design
facilitates easy installation into the process and test equipment.
The stage is provided with vacuum plate and locating pins so that
automatic loading/unloading is implemented easily.

      The Figure shows an example of the mechanism.  The ball screw
(2) driven by the servo motor (1) initiates the linear movement of
stage (4) on the linear motion guides (3a), (3b).  Stage (4's)
movement transferred to stage (6) via the linear motion guides (5a),
(5b), (5c)  on the slant surface.  Stage (6), which is guided by the
linear motion  guides (7a), (7b), (7c), (7d), positions the substrate
on the vacuum plate (12) in a vertical direction.  The substrate is
located in an X-Y  direction by the locating pins.

      The datum pins are (8a), (8b), and (9) or (10)
(selectable).  Posi...