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Exciting Microwave Energy into Metal Layer to Improve Yield and Reliability

IP.com Disclosure Number: IPCOM000118824D
Original Publication Date: 1997-Jul-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 2 page(s) / 32K

Publishing Venue

IBM

Related People

Gregoritsch, A: AUTHOR

Abstract

Disclosed is a method of using Radio Frequency (RF) energy to break down metallic/ semiconductor particles at prefuse burn-in so that redundancy may be invoked to recover the yield and enhance reliability. These particles lie in the insulation residing above the semiconductor surface and would fail either during subsequent module level burn-in (with associated loss of yield) or later in the field, thus causing a worsening of reliability.

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Exciting Microwave Energy into Metal Layer to Improve Yield and Reliability

      Disclosed is a method of using Radio Frequency (RF) energy to
break down metallic/ semiconductor particles at prefuse burn-in so
that redundancy may be invoked to recover the yield and enhance
reliability.  These particles lie in the insulation residing above
the semiconductor surface and would fail either during subsequent
module level burn-in (with associated loss of yield) or later in the
field, thus causing a worsening of reliability.

      Metallic/semiconductor particles act as conductive antennas to
receive RF energy from a RF source.  These particles: lie in the
insulator above the wafer surface; are assumed to be electrically
isolated; are in the presence of an E-field (from on-chip
metallurgy).  As the chip is electrically exercised, the particles
will experience a higher E-field due to the superpositioning of the
chip's E-field and that of the radio frequency energy source.
Consequently, they provide a higher probability of reaching
electrical breakdown of the defect at this early prefuse stage where
redundancy may be invoked  and, hence, yield recovered rather than at
module level burn-in where a fail causes yield loss.  In addition,
the added E-field aided-breakdown  will enhance reliability, as it
will tend to make particles fail early  that would have failed in the
field had no enhanced E-field been available.