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Improved Half-Pitch Cassette

IP.com Disclosure Number: IPCOM000118839D
Original Publication Date: 1997-Aug-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 1 page(s) / 28K

Publishing Venue

IBM

Related People

Inoue, Y: AUTHOR [+2]

Abstract

Disclosed is an improved half-pitch cassette which enables double batch size on a conventional wet bench without its tank shape. The objective is to improve the capacity of wet bench and to reduce the chemical consumption.

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This is the abbreviated version, containing approximately 100% of the total text.

Improved Half-Pitch Cassette

      Disclosed is an improved half-pitch cassette which enables
double batch size on a conventional wet bench without its tank shape.
The objective is to improve the capacity of wet bench and to reduce
the chemical consumption.

      The Figure shows the schematic diagram of the conventional
cassette and the improved half-pitch cassette.  The improved cassette
is composed of the low profile half-pitch cassette (1) and the
Perfluoroalkoxy (PFA) handle (2).  The PFA handle is fitted to the
low profile half-pitch cassette with welding and PFA screws.

      Additionally, this improvement is effective in reducing
contamination from PFA cassette, and the PFA handle is more helpful
in carrying the cassette with 50 wafers.