Browse Prior Art Database

Long Life Gas Director For Isotropic Etch Chamber

IP.com Disclosure Number: IPCOM000119005D
Original Publication Date: 1997-Oct-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 2 page(s) / 23K

Publishing Venue

IBM

Related People

Cazimichele, N: AUTHOR [+3]

Abstract

A gas director is a device that allows etching of resist materials with an oxygen plasma in an isotropic etch chamber. Disclosed is an improved gas director perfectly adapted to most of the standard RIE tools. Some commercially available plastic parts (clamps, screws, etc.) of the gas director suffer serious damages after a few hours of etching. The new gas director, shown in the drawing, is designed as an integral part, i.e., without any removable parts. In addition, it is totally made of ceramic. The life-time of the new gas director has now increased to above a thousand hours of etch processing.

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Long Life Gas Director For Isotropic Etch Chamber

      A gas director is a device that allows etching of resist
materials with an oxygen plasma in an isotropic etch chamber.
Disclosed is an improved gas director perfectly adapted to most of
the standard RIE tools.  Some commercially available plastic parts
(clamps, screws,  etc.) of the gas director suffer serious damages
after a few hours of etching.  The new gas director, shown in the
drawing, is designed as an  integral part, i.e., without any
removable parts.  In addition, it is totally made of ceramic.  The
life-time of the new gas director has now  increased to above a
thousand hours of etch processing.