Browse Prior Art Database

Sealing Two-Sided Load Lock Gate Valve Mechanism

IP.com Disclosure Number: IPCOM000119328D
Original Publication Date: 1991-Jan-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 2 page(s) / 82K

Publishing Venue

IBM

Related People

Flotta, M: AUTHOR [+2]

Abstract

Disclosed is a vacuum sealing single two-sided load lock gate valve, flat spring mechanism, for quick entry to and from one chamber or multiple chamber systems without breaking vacuum. The single and multiple configurations are shown in the figure.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 52% of the total text.

Sealing Two-Sided Load Lock Gate Valve Mechanism

      Disclosed is a vacuum sealing single two-sided load lock
gate valve, flat spring mechanism, for quick entry to and from one
chamber or multiple chamber systems without breaking vacuum.  The
single and multiple configurations are shown in the figure.

      The thin cross-section geometry, two-sided sealing in one
valve, ease of load lock entry, flexible installation and portable,
light weight auxiliary chamber removal for single and multi-layer
thin film fabrication are the major advantages.

      These auxiliary chambers can house sputtering gun, ion gun, or
electron beam gun sources; sample substrate holders or other
processing tools as required can be stored on a shelf under vacuum.
A small ion pump on a manifold can be implemented to retain < 10-7
Torr vacuum pressure.  One by one, these auxiliary chambers can be
connected to this load lock gate valve and cycled for single- or
multi-layer thin film depositions.

      Transporting these lightweight auxiliary chambers can be easy;
therefore, quick source changes, multi-layer thin film processing or
in-situ analysis without breaking vacuum can be accomplished.

      This load lock gate valve can be UHV compatible with metal
O-ring seals.

      The operation of this gate valve is simple.  Procedures are
described below which show the operation and flexibility for this
two- sided sealing load lock gate valve and how it can be utilized
under three different conditions.

      Referring to the figure, in case 1, the auxiliary chamber (G)
and sealing plate (A) are placed into position and located on a
retaining counterbore (C) and secured by four quick disconnects or
locks (D).  The load lock gate valve space (F) and main vacuum
chamber (H) are under the same vacuum; they are held by...