Browse Prior Art Database

Automatic Nitrogen Molybdenum Mask Cleaning Tool

IP.com Disclosure Number: IPCOM000119341D
Original Publication Date: 1991-Jan-01
Included in the Prior Art Database: 2005-Apr-01
Document File: 2 page(s) / 51K

Publishing Venue

IBM

Related People

Engelbride, EF: AUTHOR [+4]

Abstract

Described is a tool and process for automatically cleaning a molybdenum mask. Such masks are typically used in applying metal to a wafer. Use of this tool has been shown to significantly improve in both quality and consistency of mask cleanliness, as compared to a cleaning operation performed by an operator using a hand-held nitrogen "gun."

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Automatic Nitrogen Molybdenum Mask Cleaning Tool

      Described is a tool and process for automatically
cleaning a molybdenum mask.  Such masks are typically used in
applying metal to a wafer.  Use of this tool has been shown to
significantly improve in both quality and consistency of mask
cleanliness, as compared to a cleaning operation performed by an
operator using a hand-held nitrogen "gun."

      The mask to be cleaned is fed to the tool from a carrier and
held in cleaning cups.  The tool then cleans the mask using
pressurized nitrogen sprays, which are directed at an approximately
10-degree angle against both sides of the mask.  Point-of-use filters
assure that only highest purity nitrogen is supplied to the rotating
cleaning cups. Particles loosened during the cleaning process are
removed from the cup and mask areas by a vacuum exhaust.  The cleaned
mask is held in the cleaning tool until required for use by the
operator, thus preserving mask cleanliness.

      The tool is easily converted for use with more than one wafer
size and can be operated in either a manual or automatic mode.

      The figures depict the tool and its operation.