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Browse Prior Art Database

Dosimeter Film Technology within a Wafer Form Factor

IP.com Disclosure Number: IPCOM000119743D
Original Publication Date: 1991-Feb-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 1 page(s) / 47K

Publishing Venue

IBM

Related People

Hoffman, SR: AUTHOR [+2]

Abstract

A wafer form factor tool is shown for holding dose measurement film on vacuum chuck-based semiconductor processing tools.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 81% of the total text.

Dosimeter Film Technology within a Wafer Form Factor

      A wafer form factor tool is shown for holding dose measurement
film on vacuum chuck-based semiconductor processing tools.

      One method of making dose measurements involves attaching
pieces of dosimeter film onto wafers for exposure on lithographic
tools, e.g., x-ray, electron, and ion beam systems. Similar
techniques may be employed on implantation tools. Disadvantages with
this method include difficulty holding the film uniformly flat, film
(tape) extending above the wafer surface, and tool contamination due
to contact with the tape/adhesive. A new method for holding the
dosimeter film obviates the need of taping film onto wafers for the
purpose of dose measurements.

      The new approach utilizes a film carrier with the same form
factor as a semiconductor wafer compatible with the exposure system.
Referring to the figure, the backside of a film carrier wafer is
etched with a uniform matrix of very small holes. The total size of
the perforated area is equal to the size of the dosimeter film
sample, and is intended to allow a vacuum chuck to uniformly seat the
film while in the tool. In order to allow the frontside of the wafer
to be closely aligned to a mask or other surface, the wafer frontside
is etched back by an amount slightly in excess of the film thickness
to form a film cavity. The film cavity should just equal the
dosimeter film size, allowing the side walls of the cavity to
temporarily...