Original Publication Date: 1991-Mar-01
Included in the Prior Art Database: 2005-Apr-02
Decker, DW: AUTHOR [+3]
AbstractContamination on the substrate surface and damage to the substrate is significantly reduced when handling is done with the use of the substrate gripper.
on the substrate surface and damage to the
substrate is significantly reduced when handling is done with the use
of the substrate gripper.
disclosed is a hand tool, of which the user provides
the holding force, for handling substrates (Fig. 1).
arms are placed so as not to extend over the
substrate, avoiding the possibility of dropping particles on
sensitive surfaces. A pivoting action is provided by a shoulder
screw connecting the arm and its jaw, allowing parallel alignment of
jaw to substrate (Fig. 1).
The jaws are
made of DELRIN* to eliminate damaging the
substrate. These jaws utilize a VITON* O-ring to reduce slippage
between the substrate and jaw (Fig. 2).
* Trademark of E. I. du Pont de Nemours & Co.