Browse Prior Art Database

Substrate Gripper

IP.com Disclosure Number: IPCOM000119867D
Original Publication Date: 1991-Mar-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 1 page(s) / 38K

Publishing Venue

IBM

Related People

Decker, DW: AUTHOR [+3]

Abstract

Contamination on the substrate surface and damage to the substrate is significantly reduced when handling is done with the use of the substrate gripper.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Substrate Gripper

      Contamination on the substrate surface and damage to the
substrate is significantly reduced when handling is done with the use
of the substrate gripper.

      The device disclosed is a hand tool, of which the user provides
the holding force, for handling substrates (Fig. 1).

      The gripper arms are placed so as not to extend over the
substrate, avoiding the possibility of dropping particles on
sensitive surfaces.  A pivoting action is provided by a shoulder
screw connecting the arm and its jaw, allowing parallel alignment of
jaw to substrate (Fig. 1).

      The jaws are made of DELRIN* to eliminate damaging the
substrate.  These jaws utilize a VITON* O-ring to reduce slippage
between the substrate and jaw (Fig. 2).
*  Trademark of E. I. du Pont de Nemours & Co.