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X-Ray Diffractometer for In-Situ On-Time Kinetic Analysis of Thin Film Interfacial Reactions

IP.com Disclosure Number: IPCOM000119896D
Original Publication Date: 1991-Mar-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 2 page(s) / 67K

Publishing Venue

IBM

Related People

Angilello, J: AUTHOR [+3]

Abstract

Described is an X-ray diffractometer which provides in-situ on-time kinetic analysis of thin film interfacial reactions. The instrumentation provides the capability of studying metal reactions and kinetics with substrates, such as GaAs.

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X-Ray Diffractometer for In-Situ On-Time Kinetic Analysis of Thin
Film Interfacial Reactions

      Described is an X-ray diffractometer which provides
in-situ on-time kinetic analysis of thin film interfacial reactions.
The instrumentation provides the capability of studying metal
reactions and kinetics with substrates, such as GaAs.

      Typically, kinetic information of thin film interfacial
reactions is obtained by using Rutherford backscattering spectroscopy
(RBS).  An example is the analysis of rate and activation energy of
the formation of silicide on silicon by RBS.  In the case of metal
film and GaAs, the RBS technique is considered unsatisfactory because
the mass of Ga and As would be too close to each other.

      It has previously been demonstrated that in a Pt/GaAs reaction
the change in X-ray diffraction intensity can be used for rate
monitoring.  However, this method is slow since many X-ray runs are
required and each run may take four to five hours.  On the other
hand, Auger electron analysis and Secondary Ion Mass Spectroscopy
(SIMS) need sputtering, which is too slow.

      The concept described herein combines a Seeman-Bohin X-ray
diffraction arrangement with a position-sensitive detector in a high
vacuum sample heating stage.  Fig. 1 illustrates the geometrical
arrangement of the instrument. The rotating counter has been replaced
by a position-sensitive detector which typically covers an arc of
120o in a circle of 10" in diameter....