Browse Prior Art Database

Fully Automated Photo Cluster

IP.com Disclosure Number: IPCOM000119931D
Original Publication Date: 1991-Mar-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Miyashita, A: AUTHOR [+3]

Abstract

Disclosed is a fully automated system for photo processing from resist application to resist development in which all units are physically and logically linked as a cluster.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 97% of the total text.

Fully Automated Photo Cluster

      Disclosed is a fully automated system for photo
processing from resist application to resist development in which all
units are physically and logically linked as a cluster.

      As shown in the figure, the system includes host processor 10,
block controller 12 and photo processing section 14.  The processing
section 14 includes wafer cassette loader 16, resist coater 18,
stepper (exposure unit) 20, resist developer 22 and wafer cassette
unloader 24 which are linked as a cluster to perform fully automated
photo processing and wafer transfer under the control of the block
controller 12.

      This system has the following features.
(1) Wafer cassette load/unload
   Wafers are housed in cassettes and transferred between a wafer
stock station and the cluster load/unload station by an automated
guided vehicle.
(2) Recipe download
   The host processor 10 downloads the recipes for all the units of
the processing section 14 for each lot in accordance with the photo
level of the lot.
(3) Block controller
   The controller 12 coordinates the consecutive processes of the
coater, stepper and developer units for each wafer.  The controller
also manages the lot movement in the cluster.

      As a result of this cluster implementation, cycle time can be
significantly reduced (4x - 6x), defect density is lowered because of
the fully automated wafer handling, and precise process control can
be realized because the process ste...