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Browse Prior Art Database

Bar-Code Reading Through an Opaque, Antistatic, Reticle Storage Box

IP.com Disclosure Number: IPCOM000120009D
Original Publication Date: 1991-Mar-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 2 page(s) / 35K

Publishing Venue

IBM

Related People

Delehanty, DJ: AUTHOR [+3]

Abstract

Disclosed is a means of reading a reticle (photomask) with an etched bar-code in chrome through an opaque material.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Bar-Code Reading Through an Opaque, Antistatic, Reticle Storage Box

      Disclosed is a means of reading a reticle (photomask)
with an etched bar-code in chrome through an opaque material.

      Currently, reticle storage boxes that are made of electrostatic
dissipative materials 1, are opaque, and do not allow optical
bar-code scanners to penetrate the box.  Bar-code reading through an
opaque material can be accommodated by placing a clear, optically
transmissive window 2, through the box over the area to be scanned by
the bar-code reader.  Directly beneath the etched bar-code 3, on the
reticle 4, is a white, reflective support 5, to allow for easy
reading of the light-dark contrast bands of the bar-code.

      The benefit is that this allows the reticle, once built and
stored, to remain in the box except during exposures. Reduced
handling and pellicle damage result in lower contamination and higher
device yields.  Current labeling systems are eliminated since the
reticle is solely tracked by the reticle bar-code "license plate".