Browse Prior Art Database

Thin Film Process Carrier

IP.com Disclosure Number: IPCOM000120133D
Original Publication Date: 1991-Mar-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 2 page(s) / 63K

Publishing Venue

IBM

Related People

Gallagher, GM: AUTHOR

Abstract

Disclosed is a transport and process carrier for use in ultra-clean thin film manufacturing. The one-piece injection-molded design has many features that permit the carrier to be used as the equipment interface vehicle or chemical process vehicle. The carrier can be used in all thin film processes and equipment. Product transfers are, therefore, minimized, as is handling contamination.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Thin Film Process Carrier

      Disclosed is a transport and process carrier for use in
ultra-clean thin film manufacturing.  The one-piece injection-molded
design has many features that permit the carrier to be used as the
equipment interface vehicle or chemical process vehicle.  The carrier
can be used in all thin film processes and equipment.  Product
transfers are, therefore, minimized, as is handling contamination.

      The perfluoroalkoxy fluorocarbon resin (Teflon PFA 340*) is
compatible with all the thin film process chemicals and temperatures.
The design will not entrap any process liquids which may contaminate
the product or succeeding processes.

      In the figure, 1 shows two product types.  The product support
slots 2 have an angled lead-in 3 and the top view 4 shows the small
product radius which minimize product contact.  The carrier can be
used in a upright position 6 or in the position shown in the figure.
Each product support slot has a stay tab 7 which "clamps" the product
just before coming to rest which prevents the product from easily
falling out.  Wash openings 8 permit the carrier to be used in
product cleaning processes.  End slots 9 and floppy disk slot 10 are
available for product tracking.  The carrier sidewall includes a
recessed pocket for insertion of a unique carrier identification tag
11.
*  Trademark of E. I. du Pont de Nemours & Co.