Browse Prior Art Database

Process for Enhanced Growth of Diamond Thin Films by the Spray Application of a Seed-Layer

IP.com Disclosure Number: IPCOM000120190D
Original Publication Date: 1991-Mar-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 1 page(s) / 64K

Publishing Venue

IBM

Related People

Cuomo, JJ: AUTHOR [+3]

Abstract

Disclosed is a process for the deposition of diamond thin films which avoids the initial impediment to growth (incubation period) and produces smooth and continuous films at an earlier stage of growth. This initial rapid and uniform growth is achieved by a pre-deposition treatment of the substrate consisting of the uniform aerosol-spray application of very fine diamond particles.

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Process for Enhanced Growth of Diamond Thin Films by the Spray Application
of a Seed-Layer

      Disclosed is a process for the deposition of diamond thin films
which avoids the initial impediment to growth (incubation period) and
produces smooth and continuous films at an earlier stage of growth.
This initial rapid and uniform growth is achieved by a pre-deposition
treatment of the substrate consisting of the uniform aerosol-spray
application of very fine diamond particles.

      Plasma enhanced chemical vapor deposition (PCVD) and hot
filament or microwave driven processes are used to deposit diamond
thin films.  With untreated substrates, the initial deposition rates
of the diamond films are impeded by the lack of nucleation sites.
Nucleation and growth under these conditions results in the formation
of large grains. When non-uniform seed-layers are applied, prior to
deposition of the film, the film will initially replicate the
non-uniform nature of the seed-layer.

      The disclosed spray process provides an extremely uniform
seed-layer on the substrate which provides nucleation sites for the
uniform and rapid growth of diamond films.  An aerosol-spray
application of a suspension of very fine (1 to 1/10 micrometer)
diamond particles in a volatile liquid (e.g., ethyl alcohol) provides
this uniform seed-layer.  It is critical that the spray parameters be
controlled such that the liquid evaporates either before reaching the
substrate or just as it reaches...