Browse Prior Art Database

In Situ Monitor for Dry Processing of Polymers

IP.com Disclosure Number: IPCOM000120192D
Original Publication Date: 1991-Mar-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 1 page(s) / 44K

Publishing Venue

IBM

Related People

Eldridge, BN: AUTHOR [+4]

Abstract

Disclosed is a technique for the characterization of surfaces in respect to composition and chemical structure during dry processing steps under vacuum.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

In Situ Monitor for Dry Processing of Polymers

      Disclosed is a technique for the characterization of surfaces
in respect to composition and chemical structure during dry
processing steps under vacuum.

      Dry process methods for deposition of materials used for
semiconductor fabrication have a number of distinct advantages.
These techniques are just beginning to gain acceptance as a means of
depositing polymer materials, which have traditionally been deposited
from the liquid phase. Surface properties of the deposited films play
a crucial role in multistep processes since adhesive failure at layer
boundaries (delamination) may often be attributed to contamination at
the interface between layers, or to incorrect assumptions regarding
the nature of the surfaces for layers in intimate contact.  We have
established that time-of- flight secondary ion mass spectrometry is
capable of determining structurally significant elements of surfaces
of certain polymers, while at the same time it is non-destructive to
the material under study.  Use of time-of-flight static secondary ion
mass spectrometry as a non-destructive process monitor for dry
polymer deposition/surface modification processes is quite promising.

      Specific features of this disclosure are:
1.  In situ monitor for dry polymer deposition/surface modification
processes.
2.  Non-destructive to material under study.
3.  Small area capability.

      Disclosed anonymously.