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In-Situ Manipulator for Vacuum System

IP.com Disclosure Number: IPCOM000120344D
Original Publication Date: 1991-Apr-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 2 page(s) / 72K

Publishing Venue

IBM

Related People

Brady, MJ: AUTHOR [+3]

Abstract

Ion-assisted depositions utilizing ion guns is a well-established technology in the fabrication of thin films. Typically, ion guns are installed in vacuum systems in a fixed geometry and are used for numerous tasks such as in-situ substrate cleaning, milling, etching etc. In certain applications, it would be advantageous to have several guns available within the vacuum chamber to allow for the different tasks, but chamber space and money are limiting factors.

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In-Situ Manipulator for Vacuum System

      Ion-assisted depositions utilizing ion guns is a
well-established technology in the fabrication of thin films.
Typically, ion guns are installed in vacuum systems in a fixed
geometry and are used for numerous tasks such as in-situ substrate
cleaning, milling, etching etc.  In certain applications, it would be
advantageous to have several guns available within the vacuum chamber
to allow for the different tasks, but chamber space and money are
limiting factors.

      Disclosed is a design for an in-situ manipulator that utilizes
as single ion gun with the capability of performing multi-tasks,
within a vacuum chamber, in conjunction with E-beam evaporation and
sputter depositions, for example. The manipulator provides for
linear, rotational, and variable incidence angle ion-assisted
deposition.

      The design is shown in the figure.  The shaft 1 of the
manipulator is a critical component of the device because it
facilitates several other design features, such as linear movement of
the ion source 2- (Axis A), ease of adapting the angular assembly
(swivel base), and the use of a rotary feed-through 3 that is welded
to a Dutchman flange 4.  A unique feature of this tool is a roller
support 5.  The roller support allows the ease of linear motion (Axis
A); it also increases the shaft's capacity for supporting the weight
of the ion gun 2 and swivel base when the shaft is extended.  The
swivel base is a multi-functiona...