Browse Prior Art Database

Quartz Boat Enhancement for Automated Handling

IP.com Disclosure Number: IPCOM000120456D
Original Publication Date: 1991-Apr-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 1 page(s) / 50K

Publishing Venue

IBM

Related People

Kopecky, HR: AUTHOR [+2]

Abstract

A standard quartz boat used in manufacturing semiconductor devices is modified so that it will be amenable to robotic loading and unloading of furnaces.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Quartz Boat Enhancement for Automated Handling

      A standard quartz boat used in manufacturing semiconductor
devices is modified so that it will be amenable to robotic loading
and unloading of furnaces.

      Existing boats are designed for manual handling and are not
usable in a robotic environment.  This disclosure adds a 30~ chamfer
on the bottom cross-member(s) of the boat, as illustrated in the
photograph of FIG. 1.  The geometrical design makes it possible for a
robot to accurately locate the boat during loading and unloading
operations.

      Disclosed anonymously.