Browse Prior Art Database

Dynamic Debris Removal in High Power Electron Beam Personalization

IP.com Disclosure Number: IPCOM000120575D
Original Publication Date: 1991-May-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 3 page(s) / 93K

Publishing Venue

IBM

Related People

Booke, MA: AUTHOR [+2]

Abstract

A technique is disclosed to collect and dynamically remove the materials ejected during the electron beam (E-beam) personalization of ceramic green sheets from the optically sensitive areas of an E-beam system and thus avoid degradation of the E-beam performance. A mechanical assembly which employs a driver motor, spools of metalized MYLAR*, and gears is used to shield the optically sensitive area in the E-beam system and dynamically replenish clean surfaces so there is no static charging of debris in the vicinity of the beam path and, hence, no degradation to the E-beam system accuracy.

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This is the abbreviated version, containing approximately 62% of the total text.

Dynamic Debris Removal in High Power Electron Beam Personalization

      A technique is disclosed to collect and dynamically
remove the materials ejected during the electron beam (E-beam)
personalization of ceramic green sheets from the optically sensitive
areas of an E-beam system and thus avoid degradation of the E-beam
performance.  A mechanical assembly which employs a driver motor,
spools of metalized MYLAR*, and gears is used to shield the optically
sensitive area in the E-beam system and dynamically replenish clean
surfaces so there is no static charging of debris in the vicinity of
the beam path and, hence, no degradation to the E-beam system
accuracy.

      The method employs (a) a square gold-plated quartz tube mounted
inside the critical electron beam optical elements, (b) a driver
motor with four gears and four spools assembled just above the target
green sheet, and (c) four spools with four rollers mounted at the top
of the square quartz tube.  Fig. 1 shows the dynamic debris removal
system configuration in the E-beam system.  Metalized MYLAR 1 is
loaded onto the top four spools 2 and guided downward via the quartz
tube 3 to the corresponding spools 4 at the lower end with metalized
surfaces facing the optical axis 5.  The top four spools are not
connected to each other.  They are constructed in such a way that
there is slight friction control for providing constant tension in
the MYLAR strips so they stay stretched. The driver motor can be
progra...