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Organic Deposition Mask

IP.com Disclosure Number: IPCOM000120716D
Original Publication Date: 1991-May-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 1 page(s) / 36K

Publishing Venue

IBM

Related People

Brady, MJ: AUTHOR [+4]

Abstract

The invention described is an organic deposition mask (ODM) and the stiffener which is used to press the mask to the substrate. The mask is a free standing organic film, such as polyimide. The ODM film may be tailored to have a desired coefficient of thermal expansion (CTE) closely matched to that of the substrate for which it is used, usually silicon. It consists of the free standing film, usually on the order of 100 microns thick, patterned with through hole features to allow deposition in selected areas of the substrate. The through holes may be made to be as large as desired, and can be produced to have a desired vertical profile to aid in lift-off of the ODM after deposition. The patterned holes may be produced by laser ablation, punching, photolithographic processing, or other suitable technique.

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Organic Deposition Mask

      The invention described is an organic deposition mask (ODM) and
the stiffener which is used to press the mask to the substrate.  The
mask is a free standing organic film, such as polyimide.  The ODM
film may be tailored to have a desired coefficient of thermal
expansion (CTE) closely matched to that of the substrate for which it
is used, usually silicon.  It consists of the free standing film,
usually on the order of 100 microns thick, patterned with through
hole features to allow deposition in selected areas of the substrate.
The through holes may be made to be as large as desired, and can be
produced to have a desired vertical profile to aid in lift-off of the
ODM after deposition.  The patterned holes may be produced by laser
ablation, punching, photolithographic processing, or other suitable
technique.

      In order to press the ODM firmly to the surface of the
substrate, a ribbed stiffener may be placed on top of the ODM.  The
stiffener is fabricated of a rigid material, molybdenum or other
suitable material, either metallic or non-metallic.  It has ribs only
in the kerf areas, needs only coarse definition and alignment, needs
not to have a matched CTE, and may be reused.  It may be fabricated
by an inexpensive process, punching or etching, for example.

      Disclosed anonymously.