Browse Prior Art Database

Metal Mask Dedicated Carrier

IP.com Disclosure Number: IPCOM000120858D
Original Publication Date: 1991-Jun-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 4 page(s) / 110K

Publishing Venue

IBM

Related People

Bolde, LR: AUTHOR [+2]

Abstract

Disclosed is a device which significantly increases the ability to handle thin metal substrates without causing damage by eliminating direct foil handling. The Dedicated Carrier is designed to support one substrate piece through an entire manufacturing cycle, thereby being dedicated to that substrate. This allows the operator to handle the carrier instead of making direct contact with the substrate. Utilizing this approach results in a reduction of mechanical and contamination type damage. In addition, the rigid carrier frame allows the substrates to be easily manipulated by automatic means.

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This is the abbreviated version, containing approximately 52% of the total text.

Metal Mask Dedicated Carrier

      Disclosed is a device which significantly increases the
ability to handle thin metal substrates without causing damage by
eliminating direct foil handling.  The Dedicated Carrier is designed
to support one substrate piece through an entire manufacturing cycle,
thereby being dedicated to that substrate.  This allows the operator
to handle the carrier instead of making direct contact with the
substrate. Utilizing this approach results in a reduction of
mechanical and contamination type damage.  In addition, the rigid
carrier frame allows the substrates to be easily manipulated by
automatic means.

      The Dedicated Carrier with substrate is shown in Fig. 1.  Fig.
2 illustrates the components which make up the design of the carrier.

      Referring to Fig. 2 the carrier frame 1 is preferably
fabricated from stainless steel.  The steel is formed into a square,
and it is a little bit larger than the substrate and welded where the
ends meet 2.

      A handle 3 is also fabricated from a similar stainless steel
and is welded to one side of the frame.  The top of the handle
includes a protrusion 4 towards the frame which is used for
positioning the carrier on support fixturing. This handle is
convenient for manual handling as well as automatic handling.

      Two long pins 5 fabricated from stainless steel are press
fitted into holes 6 drilled into the frame 1 in two locations as
shown.  These pins are used for guiding the carrier into position and
supporting the carrier during automatic and manual handling.

      Each corner of the carrier consists of five components wh...