Browse Prior Art Database

Magnetic, Self-Aligned Laser And Screening Mask

IP.com Disclosure Number: IPCOM000120882D
Original Publication Date: 1991-Jun-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 2 page(s) / 78K

Publishing Venue

IBM

Related People

Ehrenberg, SG: AUTHOR [+3]

Abstract

Disclosed is a process which uses a magnetic metal mask both to define features laser drilled into an insulating material and to define conductive paste which is screened into those features. The novel process is illustrated in Figs. 1, 2 and 3.

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Magnetic, Self-Aligned Laser And Screening Mask

      Disclosed is a process which uses a magnetic metal mask
both to define features laser drilled into an insulating material and
to define conductive paste which is screened into those features.
The novel process is illustrated in Figs. 1, 2 and 3.

      In the manufacture of multilayer electronic packages, lasers
are being used to pattern insulating dielectrics through a process
known as laser ablation.  The desired pattern can be ablated into a
dielectric material by overlaying a metal mask which has been etched
with features and scanning the laser over the mask.  The dielectric
is ablated away in areas where it is not protected by the overlaying
mask.

      Metal masks are also used to apply metallization patterns onto
insulating layers in these packages through screening processes.  In
these processes a metal mask is aligned to patterns on the insulating
layer and a paste (typically, a solvent, metal, polymer composite) is
drawn over the metal mask surface in front of a blade.  The paste is
screened through the patterns in the metal mask and onto the surface
of the insulator to form conductive paths.

      If a magnetic material is used as a laser ablation contact mask
(i.e., invar, alloy 42, or other magnetic metal), it can be held in
firm contact with the dielectric during laser ablation by inserting
the insulator between a strong magnet and the metal mask.  Following
laser ablation, this assem...