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Browse Prior Art Database

Mask Holder Cassette with Magnifier Lens for Part Number Verification

IP.com Disclosure Number: IPCOM000120939D
Original Publication Date: 1991-Jun-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 1 page(s) / 44K

Publishing Venue

IBM

Related People

Cook, LG: AUTHOR [+2]

Abstract

Disclosed is a magnifying lens (1), which is strategically located on the back side of the opaque ESD conductive cassette assembly (2). The said lens (two are shown, but not limited to that number) is attached to the cassette via a co-molding process. Attachment is not limited to that means. The said lens can be of a snap-fit type, chemically bonded, or ultrasonically welded in place. The said lens would then become a permanent part of the cassette assembly (2). This type of assembly would allow part number verification of the glass photomask (3) when attached to the mask holder body (4) and inserted into the cassette assembly at the mask preparation area (clean room).

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This is the abbreviated version, containing approximately 100% of the total text.

Mask Holder Cassette with Magnifier Lens for Part Number Verification

      Disclosed is a magnifying lens (1), which is strategically
located on the back side of the opaque ESD conductive cassette
assembly (2).  The said lens (two are shown, but not limited to that
number) is attached to the cassette via a co-molding process.
Attachment is not limited to that means.  The said lens can be of a
snap-fit type, chemically bonded, or ultrasonically welded in place.
The said lens would then become a permanent part of the cassette
assembly (2).  This type of assembly would allow part number
verification of the glass photomask (3) when attached to the mask
holder body (4) and inserted into the cassette assembly at the mask
preparation area (clean room).  This provides read thru capability
(5) of the mask part numbers at the manufacturing level, and greatly
reducing "damage thru handling" of the pellicle membrane (6) present
on the working side of the photomask (3).

      Disclosed anonymously.