Browse Prior Art Database

Unique Dome-planetary System for Metal Evaporator

IP.com Disclosure Number: IPCOM000121014D
Original Publication Date: 1991-Jul-01
Included in the Prior Art Database: 2005-Apr-02
Document File: 2 page(s) / 67K

Publishing Venue

IBM

Related People

Parsons, AH: AUTHOR [+2]

Abstract

The planetary system for metal evaporations produces poor results when used with shadow masks, but produces good blanket metal films. Switching to a dome-type system produces well-defined features with shadow masks. One can also combine the dome and planetary fixtures in a single deposition, thereby increasing throughput.

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Unique Dome-planetary System for Metal Evaporator

      The planetary system for metal evaporations produces poor
results when used with shadow masks, but produces good blanket metal
films.  Switching to a dome-type system produces well-defined
features with shadow masks.  One can also combine the dome and
planetary fixtures in a single deposition, thereby increasing
throughput.

      Dome fixtures were designed to fit into existing brackets, thus
allowing continual use of the existing planetary system.  The dome
system allows the use of shadow masks for making MOS capacitors.

      The new dome fixture consists of two main parts, removable
bracket with tilt adjustment and a plate with cutouts and spring-
loaded clips.  The domes can have cutouts for the different size
substrates, as shown in Fig. 1.

      Different plates can be made and easily mounted on the existing
adjustable brackets.

      Three of these new dome fixtures could be used together,
replacing the three planetaries.  Also, these new dome fixtures can
be used together with the planetaries in any combination of three.
This allows for greater flexibility in run deposition types and
increasing throughput by combining runs, as shown in Fig. 2.

      Another advantage with the dome system is it does not ride on
the circular rail as does the planetary system, thus reducing
particulate generation.