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Measuring System for Analyzing the Interaction of Media And Materials by Spectrometric Methods

IP.com Disclosure Number: IPCOM000121098D
Original Publication Date: 1991-Jul-01
Included in the Prior Art Database: 2005-Apr-03
Document File: 1 page(s) / 45K

Publishing Venue

IBM

Related People

Krapf, E: AUTHOR [+2]

Abstract

Increasing integration densities and minimization of integrated semiconductor device structures call for media (chemicals, gases, air, DI-water) of noticeably improved purity values in the ppt range.

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This is the abbreviated version, containing approximately 89% of the total text.

Measuring System for Analyzing the Interaction of Media And Materials
by Spectrometric Methods

      Increasing integration densities and minimization of
integrated semiconductor device structures call for media (chemicals,
gases, air, DI-water) of noticeably improved purity values in the ppt
range.

      For such purity values, the interaction of the media and the
surrounding materials (housings, lines, storage boxes, handling
means) have to be quantitatively determined and minimized.

      The measuring system described below permits defining optimal
materials and surface treatments for media used to produce ULSI
circuits and determining their effect on products, such as Si wafers,
and the like.

      For this purpose, a tube consisting of the material to be
tested is produced and provided with optical windows and, if
necessary, media flow ports.  The illustrated cuvette thus obtained
is used to optically measure the medium it encloses.  Such a cuvette
may be modified to suit different measuring applications.  By
suitably treating the inner wall of the cuvette it is possible, for
example, to test the influence of such chemical or mechanical
treatments on the properties of the material surface.

      Numerous parameters, such as temperature, pressure,
concentration or flow rate may be arbitrarily varied during
measuring.  For evaluation, IR (infrared), FTIR (Fourier transform
infrared) or UV (ultraviolet) spectroscopy is used.

      These m...