Browse Prior Art Database

Surface Reflectivity System

IP.com Disclosure Number: IPCOM000121231D
Original Publication Date: 1991-Aug-01
Included in the Prior Art Database: 2005-Apr-03
Document File: 2 page(s) / 71K

Publishing Venue

IBM

Related People

Ormond, DW: AUTHOR

Abstract

A simple, economical surface reflectivity system is disclosed that quickly and accurately measures the reflectivity of thin films and surface coatings. Reflectivity data is quantitative and high quality film standards are used for comparison with values of the measured surfaces. Control of thin film processes is made possible with this system by monitoring surface reflectivity of monitors or products and comparing these values with standard values. Deviations in reflectivity from standards indicates a need for changes in the process. This reflectivity system quickly detects and quantitatively measures differences in the reflection of light from a surface which are smaller than those which can be detected by the naked eye.

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Surface Reflectivity System

      A simple, economical surface reflectivity system is
disclosed that quickly and accurately measures the reflectivity of
thin films and surface coatings. Reflectivity data is quantitative
and high quality film standards are used for comparison with values
of the measured surfaces.  Control of thin film processes is made
possible with this system by monitoring surface reflectivity of
monitors or products and comparing these values with standard values.
Deviations in reflectivity from standards indicates a need for
changes in the process.  This reflectivity system quickly detects and
quantitatively measures differences in the reflection of light from a
surface which are smaller than those which can be detected by the
naked eye.

      For example, thin film metal with a dull tarnished surface and
low reflectivity can indicate process variation-induced changes in
the film's grain structure, surface texture and metal oxide content.
High quality, sputter-deposited metal thin films of Cr/Cu/Cr have a
small, mixed columnar grain structure which have the following
properties:  low resistivity and a highly reflective metallic
surface.  When air or water is present in trace amounts during
sputter deposition, the entire grain structure of the film changes to
an open, porous columnar structure.  Properties of this low quality
film include high resistivity and a 30 percent decrease in film
reflectivity from the high quality standards.  By monitoring the
sputter-deposited thin films with the disclosed reflectivity system,
one can easily detect the onset of the dark chrome, Cr/Cu/Cr film
problem.

      The following procedure can be u...