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High Power, Automatically Tuned Waveguide Surfatron

IP.com Disclosure Number: IPCOM000121268D
Original Publication Date: 1991-Aug-01
Included in the Prior Art Database: 2005-Apr-03
Document File: 2 page(s) / 51K

Publishing Venue

IBM

Related People

Moisan, M: AUTHOR [+2]

Abstract

A technique is described whereby a high power, automatically tuneable waveguide surfatron has the capability of being operated in several operational modes.

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High Power, Automatically Tuned Waveguide Surfatron

      A technique is described whereby a high power,
automatically tuneable waveguide surfatron has the capability of
being operated in several operational modes.

      Typically, tuneable waveguides used in microwave applications
utilized a stub method of tuning.  However, this method did not have
an optimum matching point and suffered from extreme sensitivity and
loss of power due to network matching procedures.

      Generally, the only methods capable of providing close to 100%
matching between the source of microwave energy and the plasma have
been surface wave applicators, such as the surfatron.  However, this
method has the disadvantage that the diameter of the plasma is
limited to 20 mm, at microwave frequencies, and is fed by coaxial
lines which are limited to a maximum power of  400 watts.  This is
not considered satisfactory for high power (> 1 KW) at frequencies
most commonly used.

      The concept described herein utilizes an automatically tuneable
waveguide fed surfatron to overcome the above limitations, as shown
in Fig. 1.  The device consists of waveguide 10, coaxial section 11,
water-cooled coaxial plunger 12, metal sleeve 13, plasma discharge
tube 14 and waveguide plunger 15.  Adjustments are made to coaxial
plunger 12 and waveguide plunger by means of a motor (not shown).
All components are water cooled so as to provide reproducible
contact.  Well defined minima will allow the...